https://scholars.lib.ntu.edu.tw/handle/123456789/447878
Title: | Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm | Authors: | Chen, L.-C. Huang, Y.-T. Nguyen, X.L. Chen, J.-L. Chang, C.-C. LIANG-CHIA CHEN |
Issue Date: | 2009 | Journal Volume: | 47 | Journal Issue: | 2 | Start page/Pages: | 237-251 | Source: | Optics and Lasers in Engineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447878 | DOI: | 10.1016/j.optlaseng.2008.05.016 |
Appears in Collections: | 機械工程學系 |
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