https://scholars.lib.ntu.edu.tw/handle/123456789/448640
Title: | Ultrasonic vibration assisted mechanical chemical polishing (MCP) of silicon carbide | Authors: | Liao, Y.S. Yu, Y.P. Huang, C.W. YUNN-SHIUAN LIAO |
Issue Date: | 2012 | Journal Volume: | 565 | Start page/Pages: | 255-260 | Source: | Advanced Materials Research | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/448640 | DOI: | 10.4028/www.scientific.net/AMR.565.255 |
Appears in Collections: | 機械工程學系 |
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