https://scholars.lib.ntu.edu.tw/handle/123456789/497257
標題: | Feasibility and study on rapid fabrication of 2D photonic crystal slab waveguides by combining near-field phase-shifting contact lithography and interference lithography | 作者: | Chen, Y.-P. Yan, C.-X. LON A. WANG |
公開日期: | 2007 | 起(迄)頁: | 182-183 | 來源出版物: | Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/497257 | DOI: | 10.1109/IMNC.2007.4456164 |
顯示於: | 電機工程學系 |
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