https://scholars.lib.ntu.edu.tw/handle/123456789/611904
標題: | Development of a Precision Linear and Rotary Stage Technique | 作者: | Chen P.-Y. Jywe W.-Y. Wang M.-S. Wen-Yuh Jywe |
關鍵字: | Degrees of freedom (mechanics);Equipment;Interferometers;Laser interferometry;Piezoelectricity;Proportional control systems;Three term control systems;Two term control systems;Angular positioning;Biotechnology industry;Laser interferometer measurements;Manufacturing efficiency;Mechanical equipment;Positioning accuracy;Processing equipment;Proportional integral derivative controllers;Controllers | 公開日期: | 2017 | 卷: | 38 | 期: | 2 | 起(迄)頁: | 173-178 | 來源出版物: | Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao | 摘要: | In recent years, semiconductor and biotechnology industries have put significant energy into changing linear processing equipment (X-Y-Z) into R2R (roll to roll) processing equipment. The R2R processing equipment can improve the manufacturing efficiency and reduce the cost of equipment. Consequently, angular positioning accuracy has become more important in precision mechanical equipment. This study presents the development of a precision linear and rotary stage technique applied on roller mold processing, composed of a precision rotary stage, a precision linear stage, a piezoelectric compensation stage, an angular encoder (resolution: 0.269 arc-sec per count), a spherical lens measurement system, and a multi-DOF (degree of freedom) laser interferometer measurement system (resolution: 10 nm per count). The system was integrated using a Matlab and dSPACE control interface with the Proportional Integral Derivative controller (PID controller). The compensated control results of the stage's rotary positioning accuracy, eccentric and wobble accuracy, and linear positioning accuracy are about ±0.4 arc-sec, ±5 ?m, and ±100 nm respectively. ? 2017, Chinese Mechanical Engineering Society. All right reserved. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85031906169&partnerID=40&md5=b3afdc7b5049b8866527a903fbae521a https://scholars.lib.ntu.edu.tw/handle/123456789/611904 |
顯示於: | 機械工程學系 |
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