公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
2010 | Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method | Lee, Y.-M.; Li, J.-H.; Ng, P.C.W.; Pei, T.-H.; Wang, F.-M.; Tsai, K.-Y.; KUEN-YU TSAI ; JIA-HAN LI | Journal of Micro/Nanolithography, MEMS, and MOEMS | 2 | 3 | |
2012 | Electron-beam proximity effect model calibration for fabricating scatterometry calibration samples | Yu-Tian Shen; Liu, C.-H.; Chen, C.-Y.; Ng, H.-T.; Tsai, K.-Y.; Wang, F.-M.; Kuan, C.-H.; Lee, Y.-M.; Cheng, H.-H.; Li, J.-H.; KUEN-YU TSAI ; CHIEH-HSIUNG KUAN ; JIA-HAN LI | Advanced Lithography - Proceeding of SPIE | 3 | 0 | |
2011 | Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects | Ng, P.C.W.; Tsai, K.-Y.; Lee, Y.-M.; Wang, F.-M.; Li, J.-H.; KUEN-YU TSAI ; JIA-HAN LI | Journal of Micro/Nanolithography, MEMS, and MOEMS | 27 | 24 | |
2013 | Modeling the diffusion of preferences on social networks | Lou, J.-K.; Wang, F.-M.; Tsai, C.-H.; Hung, S.-C.; Kung, P.-H.; Lin, S.-D.; SHOU-DE LIN | 2013 SIAM International Conference on Data Mining | | | |
2014 | Multiphase optofluidics on an electro-microfluidic platform powered by electrowetting and dielectrophoresis | Fan, S.-K.; Wang, F.-M.; SHIH-KANG FAN | Lab on a Chip | | | |
2014 | Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises | Lee, Y.-M.; Li, J.-H.; Wang, F.-M.; Cheng, H.-H.; Shen, Y.-T.; Tsai, K.-Y.; Shieh, J.J.; KUEN-YU TSAI ; JIA-HAN LI | Journal of Optics (United Kingdom) | 0 | 0 | |
2012 | Thermally induced morphology evolution of pit-patterned Si substrate and its effect on nucleation properties of Ge dots | CHIEH-HSIUNG KUAN ; Chen, H.-M.; Kuan, C.-H.; Suen, Y.-W.; Luo, G.-L.; Lai, Y.-P.; Wang, F.-M.; Chen, S.-T.; CHIEH-HSIUNG KUAN | Nanotechnology | | | |