https://scholars.lib.ntu.edu.tw/handle/123456789/325534
Title: | Feedback control of piezo-based nanopositioning systems for semiconductor manufacturing | Authors: | Chun-Hung Liu Yea-Chin Yeh Kuen-Yu Tsai Jia-Yush Yen Arthur Tay Jyh-Fa Lee KUEN-YU TSAI |
Issue Date: | Dec-2006 | Source: | IFAC Workshop on Advanced Process Control for Semiconductor Manufacturing | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/325534 |
Appears in Collections: | 電機工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.