https://scholars.lib.ntu.edu.tw/handle/123456789/359317
Title: | 10 nm lines with 14 nm half pitch grating written in HSQ by electron beam direct write at 5 keV | Authors: | Fu-Min Wang Susumu Ono Hsin-Hung Su Kuen-Yu Tsai Chieh-Hsiung Kuan KUEN-YU TSAI |
Issue Date: | Jun-2010 | Start page/Pages: | 2-19 | Source: | The 54th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/359317 |
Appears in Collections: | 電機工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.