https://scholars.lib.ntu.edu.tw/handle/123456789/374102
標題: | Effects of Mechanical Strains on Characteristics of Top-gate Staggered a-IGZO Thin-Film Transistors Fabricated on Polyimide-Based Nanocomposite Substrates | 作者: | Chang-Yu Lin Chih-Wei Chien CHUNG-CHIH WU Yung-Hui Yeh Chun-Cheng Cheng Chih-Ming Lai Ming-Jiue Yu Chyi-Ming Leu Tzong-Ming Lee |
關鍵字: | In-Ga-Zn-O; mechanical strain; nanocomposite; polyimide (PI); thin-film transistors (TFTs) | 公開日期: | 七月-2012 | 卷: | 59 | 期: | 7 | 起(迄)頁: | 1956-1962 | 來源出版物: | IEEE Transactions on Electron Devices | 摘要: | In this paper, we had successfully implemented flexible top-gate staggered amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) on colorless and transparent polyimide (PI)-based nanocomposite substrates using fully lithographic and etching processes that are compatible with existing TFT mass fabrication technologies. The use of the selectively coated release layer between the nanocomposite PI film and the glass carrier ensured smooth debonding of the plastic substrate after TFT fabrication. The TFTs showed decent performances (with mobility > 10 cm 2/V·s) either as fabricated or as debonded from the carrier glass. By bending the devices to different radii of curvature (from a flat state to an outward bending radius of 5 mm), influences of mechanical strains on the characteristics of flexible a-IGZO TFTs were also investigated. In general, the mobility of the flexible a-IGZO TFT increased with the tensile strain, whereas the threshold voltage decreased with the tensile strain. The variation of the mobility in a-IGZO TFTs versus the strain appeared smaller than those observed for amorphous silicon TFTs. © 2012 IEEE. |
URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/374102 https://www.scopus.com/inward/record.uri?eid=2-s2.0-84862673991&doi=10.1109%2fTED.2012.2193585&partnerID=40&md5=5d61e940a9c73298364c93eaf28083fe |
DOI: | 10.1109/TED.2012.2193585 | SDG/關鍵字: | Bending radius; Etching process; Glass carrier; In-ga-zn-o; Mass fabrication; Mechanical strain; PI film; Plastic substrates; Radii of curvature; Release layer; Thin-film transistor (TFTs); Transparent polyimides; Carrier mobility; Fabrication; Gallium; Glass; Nanocomposite films; Nanocomposites; Polyimides; Strain; Substrates; Thin film transistors; Zinc; Gallium alloys |
顯示於: | 電機工程學系 |
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