https://scholars.lib.ntu.edu.tw/handle/123456789/391500
標題: | A new geometrical approach for rapid LED processing by using femtosecond laser | 作者: | Reklaitis, Ignas Grinys, Tomas Tomašiũnas, Rolandas Puodžiunas, Tomas Mažulė, Lina Sirutkaitis, Valdas A. Lin, Chunhan CHIH-CHUNG YANG |
關鍵字: | Femtosecond laser; GaN; Light-emitting diode; Processing; Trench | 公開日期: | 2015 | 卷: | 74 | 起(迄)頁: | 17-21 | 來源出版物: | Optics and Lasers in Engineering | 摘要: | A new original method to reduce time and resource consuming photolithography mask production operations has been suggested. By means of femtosecond laser direct writing, thus, gaining cleaner surrounding than for nano- and pico-second pulse processing, a 45° angle ablation geometry has been proven. LED chip separation trenches and n-GaN layer exposure were made simultaneously saving from one fundamental processing and alignment step without adverse effect from the laser-processing on the quantum well region. © 2015 Elsevier Ltd. All rights reserved. |
URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84930211868&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/391500 |
DOI: | 10.1016/j.optlaseng.2015.05.002 |
顯示於: | 電機工程學系 |
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