https://scholars.lib.ntu.edu.tw/handle/123456789/501073
Title: | Abbe singular-value decomposition: Compact Abbe's kernel generation for microlithography aerial image simulation using singular-value decomposition method | Authors: | Chen, C.C.P. Gurhanli, A. Chiang, T.-Y. Hong, J.-J. Melvin, L.S. CHUNG-PING CHEN |
Issue Date: | 2008 | Journal Volume: | 26 | Journal Issue: | 6 | Start page/Pages: | 2322-2330 | Source: | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/501073 | DOI: | 10.1116/1.3013310 |
Appears in Collections: | 電機工程學系 |
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