https://scholars.lib.ntu.edu.tw/handle/123456789/502126
Title: | High Throughput UHV/CVD SiGe and SiGe:C Process for sige HBT and strained Si FET | Authors: | Chen, P.S. Tseng, Y.T. Tsai, M.-J. CHEE-WEE LIU |
Issue Date: | 2002 | Start page/Pages: | 145-148 | Source: | 2002 Semiconductor Manufacturing Technology Workshop, SMTW 2002 | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/502126 | DOI: | 10.1109/SMTW.2002.1197395 |
Appears in Collections: | 電機工程學系 |
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