https://scholars.lib.ntu.edu.tw/handle/123456789/374080
Title: | New parametric point spread function calibration methodology for improving the accuracy of patterning prediction in electron-beam lithography | Authors: | Chun-Hung Liu Hoi-Tou Ng Kuen-Yu Tsai KUEN-YU TSAI |
Issue Date: | Mar-2012 | Journal Volume: | 11 | Journal Issue: | 1 | Start page/Pages: | 013009 | Source: | Journal of Micro/Nanolithography, MEMS, and MOEMS | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/374080 | DOI: | 10.1117/1.JMM.11.1.013009 |
Appears in Collections: | 電機工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.