https://scholars.lib.ntu.edu.tw/handle/123456789/404484
Title: | Local stress determination in Shallow Trench Insulator structures with one-side and two-sides Pad-SiN layer by polarized micro-Raman spectroscopy extraction and mechanical modelization | Authors: | Liao, M.H. Chang, L.C. |
Issue Date: | 2011 | Start page/Pages: | 3518-3522 | Source: | 2011 International Semiconductor Device Research Symposium | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/404484 | DOI: | 10.1109/ISDRS.2011.6135349 |
Appears in Collections: | 電機工程學系 |
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