公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
2010 | Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method | Lee, Y.-M.; Li, J.-H.; Ng, P.C.W.; Pei, T.-H.; Wang, F.-M.; Tsai, K.-Y.; KUEN-YU TSAI ; JIA-HAN LI | Journal of Micro/Nanolithography, MEMS, and MOEMS | 2 | 3 | |
2012 | Electron-beam proximity effect model calibration for fabricating scatterometry calibration samples | Yu-Tian Shen; Liu, C.-H.; Chen, C.-Y.; Ng, H.-T.; Tsai, K.-Y.; Wang, F.-M.; Kuan, C.-H.; Lee, Y.-M.; Cheng, H.-H.; Li, J.-H.; KUEN-YU TSAI ; CHIEH-HSIUNG KUAN ; JIA-HAN LI | Advanced Lithography - Proceeding of SPIE | 3 | 0 | |
2011 | Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects | Ng, P.C.W.; Tsai, K.-Y.; Lee, Y.-M.; Wang, F.-M.; Li, J.-H.; KUEN-YU TSAI ; JIA-HAN LI | Journal of Micro/Nanolithography, MEMS, and MOEMS | 27 | 24 | |
2003 | A hierarchical analysis methodology for chip-level power delivery with realizable model reduction | Lee, Y.-M.; CHUNG-PING CHEN | Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC | | | |
1995 | Modeling of inducing gas-phase advective transport of VOC in the unsaturated zone | Lo, S.-L.; Lee, Y.-M.; SHANG-LIEN LO | Journal of the Chinese Institute of Engineers, Series A/Chung-kuo Kung Ch'eng Hsuch K'an | | | |
2014 | Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises | Lee, Y.-M.; Li, J.-H.; Wang, F.-M.; Cheng, H.-H.; Shen, Y.-T.; Tsai, K.-Y.; Shieh, J.J.; KUEN-YU TSAI ; JIA-HAN LI | Journal of Optics (United Kingdom) | 0 | 0 | |
2003 | The power grid transient simulation in linear time based on 3-D alternating-direction-implicit method | Lee, Y.-M.; CHUNG-PING CHEN | IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems | | | |
2014 | Refractive index and effective thickness measurement system for the RGB color filter coatings with absorption and scattering properties | Lee, Y.-M.; Cheng, H.-H.; Li, J.-H.; Tsai, K.-Y.; KUEN-YU TSAI ; JIA-HAN LI | IEEE/OSA Journal of Display Technology | 2 | 1 | |
2013 | Solution-refined method for electrostatic potential distribution of large-scale electron optics | Lee, Y.-M.; Li, J.-H.; Sheu, T.-W.-H.; Tsai, K.-Y.; KUEN-YU TSAI ; JIA-YUSH YEN ; JIA-HAN LI ; TONY W. H. SHEU | Japanese Journal of Applied Physics | 0 | 0 | |
2014 | Supplementary zones-surrounded fresnel zone plate | Lee, Y.-M.; Chen, S.-H.; Hsu, C.-P.; Chiou, P.-C.; Tsai, K.-Y.; Chung, T.-T.; Cheng-Han-Tsai, Liu, Z.-Y.; Li, J.-H.; KUEN-YU TSAI | JSAP-OSA Joint Symposia, JSAP 2014 | 0 | | |
2015 | Supplementary zones-surrounded Fresnel zone plate with enhanced optical resolution | Lee, Y.-M.; Chen, S.-H.; Hsu, C.-P.; Chiou, P.-C.; Tsai, K.-Y.; Chung, T.-T.; Tsai, C.-H.; Liu, Z.-Y.; KUEN-YU TSAI ; JIA-HAN LI | Journal of Optics (United Kingdom) | 0 | 1 | |
2013 | Void-based photonic crystal mirror with high reflectivity and low dissipation for extreme-ultraviolet radiation | Lee, Y.-M.; Li, J.-H.; KUEN-YU TSAI ; JIA-HAN LI | Journal of Micro/Nanolithography, MEMS, and MOEMS | 1 | 1 | |