公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
2004 | Fabrication of free-space MOEM component by CMOS process | Cheng, Y.-C.; Lee, C.-Y.; Dai, C.-L.; Chen, W.-J.; Chang, P.-Z.; Chen, P.-H.; PING-HEI CHEN | Tamkang Journal of Science and Engineering | | | |
2004 | Fabrication of free-space MOEM Device by CMOS Process | Cheng, Y.-C.; Lee, C.-Y.; Dai, C.-L.; Chen,W.-J.; Chang, P.-Z.; Chen, Ping-Hei | Tamkang Journal of Science and Engineering | | | |
2004 | Fabrication of micro-optical switch by post-CMOS micromachining process | Cheng, Y.-C.; Lee, C.-Y.; Dai, C.-L.; Chen, W.-J.; Chang, P.-Z.; PING-HEI CHEN ; PEI-ZEN CHANG | Proceedings of SPIE - The International Society for Optical Engineering | 0 | 0 | |
2009 | Fabrication process of integrated multi-analyte biochip system for implantable application | Tsai, Y.-C.; Chiu, N.-F.; Liu, P.-C.; Ou, Y.-C.; Liao, H.-H.; Yang, Y.-J.; Yang, L.-J.; Lei, U. ; Chao, F.-S.; Lu, S.-S.; Lin, C.-W.; Chang, P.-Z.; SHEY-SHI LU ; CHII-WANN LIN ; WEN-PIN SHIH ; Lei, U. ; YAO-JOE YANG ; PEI-ZEN CHANG | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 6 | 0 | |
2013 | Flexible proximity key-panel | Hu, Y.-C.; Ho, C.-T.; Chang, P.-Z.; PEI-ZEN CHANG | 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 | | | |
2012 | The fringe capacitance formula of microstructures | Chuang, W.-C.; Wang, C.-W.; Chu, W.-C.; Chang, P.-Z.; Hu, Y.-C.; PEI-ZEN CHANG | Journal of Micromechanics and Microengineering | | | |
2015 | The fringe-capacitance of etching holes for CMOS-MEMS | Wang, Y.-T.; Hu, Y.-C.; Chu, W.-C.; Chang, P.-Z.; PEI-ZEN CHANG | Micromachines | | | |
2015 | High power Co<inf>3</inf>O<inf>4</inf>/ZnO p-n type piezoelectric transducer | Hu, Y.-C.; Lee, T.-H.; Chang, P.-Z.; PEI-ZEN CHANG | Thin Solid Films | 18 | 17 | |
1990 | High-speed rotation of magnets on high T <inf>c</inf> superconducting bearings | Moon, F.C.; Chang, P.-Z.; PEI-ZEN CHANG | Applied Physics Letters | | | |
1990 | High-Speed Rotation of Magnets on High Tc Superconducting Bearings | Chang, P.-Z.; Moon, F.C. | Applied Physics Letters | | | |
2004 | In-situ Monitoring of Silicon Membrane Thickness during Wet Etching Using a SAW Sensor | Lee, C.-Y.; Cheng, Y.-C.; Wu, T.-T.; Chen, Y.-Y.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, Ping-Hei | Japanese Journal of Applied Physics | | | |
1990 | Levation Force, Relaxation and Magnetic Stiffness of Melt-Quenched Yba2Cu3Ox | Moon, F.C.; Chang, P.-Z.; Hojaji, H.; Barkatt, A.; Thorpe, A.N. | Japanese Journal of Applied Physics | | | |
1990 | Levitation Force and Magnetic Stiffness in Bulk High-Temperature Superconductors | Chang, P.-Z.; Moon, F.C.; Hull, J.R.; Mulcahy, T.M. | Journal of Applied Physics (SCI | | | |
1990 | Levitation force and magnetic stiffness in bulk high-temperature superconductors | Chang, P.-Z.; Moon, F.C.; Hull, J.R.; Mulcahy, T.M.; PEI-ZEN CHANG | Journal of Applied Physics | | | |
1990 | Levitation forces, relaxation and magnetic stiffness of melt-quenched yba <inf>2</inf> Cu <inf>3</inf> O <inf>x</inf> | Moon, F.C.; Chang, P.-Z.; Hojaji, H.; Barkatt, A.; Thorpe, A.N.; PEI-ZEN CHANG | Japanese Journal of Applied Physics | | | |
2005 | A MEMS micromirror fabricated using CMOS postprocess | Cheng, Y.-C.; Dai, C.-L.; Lee, C.-Y.; Chen, Ping-Hei; Chang, P.-Z. | Sensors and Actuators A, Physical | | | |
2014 | A method integrating optimal algorithm and FEM on CMOS residual stress | Chuang, W.C.; Lin, D.T.W.; Hu, Y.-C.; Lee, H.-L.; Cheng, C.-H.; Chang, P.-Z.; Quyen, N.B.; PEI-ZEN CHANG | Journal of Mechanics | | | |
1998 | A method using V-grooves to monitor the thickness of silicon membrane with μm resolution | Chang, P.-Z.; Yang, L.-J.; PEI-ZEN CHANG | Journal of Micromechanics and Microengineering | | | |
2006 | Microfabrication process of PZT thick film by aerosol deposition method | Wang, X.-Y.; Lee, C.-Y.; Chen, P.-Y.; Peng, C.-J.; Chang, P.-Z.; PEI-ZEN CHANG | Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS | | | |
2013 | Microstructural dielectric elastomer actuator with uniaxial in-plane contraction | Lin, S.-C.; Shih, W.-P.; Chang, P.-Z.; Wu, Ching-yi; PEI-ZEN CHANG ; WEN-PIN SHIH | Journal of Intelligent Material Systems and Structures | 3 | 2 | |