公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2009 | A fully model-based methodology for simultaneously correcting EUV mask shadowing and optical proximity effects with improved pattern transfer fidelity and process windows | Philip C. W. Ng; Kuen-Yu Tsai; Yen-Min Lee; Ting-Han Pei; Fu-Min Wang; Jia-Han Li; KUEN-YU TSAI ; JIA-HAN LI | Lithography Asia 2009 - Proc. SPIE | 3 | 0 | |
2010 | Fabrication of metrology test structures with programmed line edge roughness using electron beam direct write | Fu-Min Wang; Kuen-Yu Tsai; JIA-HAN LI ; Alek C. Chen; Yen-Min Lee; Yu-Tian Shen; Hsin-Hung Cheng; Chieh-Hsiang Kuan | 23rd International Microprocesses and Nanotechnology Conference (MNC 2010) | |||
2010 | Fabrication of metrology test structures with programmed line edge roughness using electron beam direct write | Fu-Min Wang; Kuen-Yu Tsai; Jia-Han Li; Alek C. Chen; Yen-Min Lee; Yu-Tian Shen; Hsin-Hung Cheng; Chieh-Hsiang Kuan; KUEN-YU TSAI | International Microprocesses and Nanotechnology Conference 2010 | 6 | 0 | |
2010 | Iterative finite-difference method for analyzing fabrication errors of lens-misaligned electron-beam direct-write lithography system | Yen-Min Lee; JIA-HAN LI ; Sheng-Yung Chen; Shiau-Yi Ma; Kuen-Yu Tsai; Tony Wen-Hann Sheu; Jia-Yush Yen | 23rd International Microprocesses and Nanotechnology Conference (MNC 2010) | |||
2010 | Iterative finite-difference method for analyzing fabrication errors of lens-misaligned electron-beam direct-write lithography system | Yen-Min Lee; Jia-Han Li; Sheng-Yung Chen; Shiau-Yi Ma; Kuen-Yu Tsai; Tony W. H. Sheu; Jia-Yush Yen; KUEN-YU TSAI | International Microprocesses and Nanotechnology Conference 2010 | |||
0 | Multilayer Mirror Structure | Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI | ||||
2015 | Multilayer Mirror Structure (多層反射鏡結構) | Jia-Han Li; Yen-Min Lee; KUEN-YU TSAI | ||||
2011 | Optical metrology of shape-varying nano-patterned gratings by analyzing the scattering signals in their pupil images | Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI | International Microprocesses and Nanotechnology Conference | |||
2011 | Optical metrology of shape-varying nano-patterned gratings by analyzing the scattering signals in their pupil images | Yen-Min Lee; JIA-HAN LI ; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Alek C. Chen | 24th International Microprocesses and Nanotechnology Conference (MNC 2011) | |||
2009 | The parallelized finite-difference time-domain simulation for the electromagnetic scattering problems | Yen-Min Lee; Yu-Cheng Chue; JIA-HAN LI ; Tony Wen-Hann Sheu | HPC Asia & APAN 2009 | |||
2012 | Solution-refined method for solving large-scale computation problems: Taking the Laplace's equation as an example | Yen-Min Lee; Jia-Han Li; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen; KUEN-YU TSAI | NCHC High-performance Computing Conference | |||
2012 | Solution-refined method for solving large-scale computation problems: Taking the Laplace’s equation as an example | Yen-Min Lee; JIA-HAN LI ; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen | 2012 NCHC High-performance Computing Conference (2012 NCHC HPC) | |||
2013 | Solution-refined method for solving large-scale electrostatic problems: Taking the electron-beam direct-write lithography system as an example | Yen-Min Lee; JIA-HAN LI ; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yu Yen | 13rd Conference on Computational Mathematics and Annual Meetings of TWSIAM | |||
2014 | Supplementary zones-surrounded Fresnel zone plate | Yen-Min Lee; Szu-Hung Chen; Chen-Pin Hsu; Pei-Chuen Chiou; Kuen-Yu Tsai; Tien-Tung Chung; Cheng-Han Tsai; Zhan-Yu Liu; JIA-HAN LI | JSAP-OSA Joint Symposium 2014 (The 75th JSAP Autumn Meeting 2014) | |||
2009 | Using transmission line theory to calculate equivalent refractive index of EUV mask multilayer structures for efficient scattering simulation by finite-difference time-domain method | Yen-Min Lee; Jia-Han Li; Philip C. W. Ng; Ting-Han Pei; Fu-Min Wang; Kuen-Yu Tsai; KUEN-YU TSAI ; JIA-HAN LI | Lithography Asia 2009, Proc. SPIE | 0 | 0 |