研究成果


第 1 到 34 筆結果，共 34 筆。

公開日期標題作者來源出版物scopusWOS全文
12021Equipment deterioration modeling and cause diagnosis in semiconductor manufacturingRostami H; Blue J; Chen A; ARGON CHEN ; JAKEY BLUE International Journal of Intelligent Systems44
22020A physics-informed Run-to-Run control framework for semiconductor manufacturingYang, W.-T.; Blue, J.; Roussy, A.; Pinaton, J.; Reis, M.S.; JAKEY BLUE Expert Systems with Applications
32020Chamber-to-Chamber Discrepancy Detection in Semiconductor ManufacturingAabir Chouichi; JAKEY BLUE ; Claude Yugma; Francois PasqualiniIEEE Transactions on Semiconductor Manufacturing97
42019Virtual metrology modeling based on Gaussian Bayesian networkYang, W.-T.; Blue, J.; Roussy, A.; Reis, M.S.; Pinaton, J.; JAKEY BLUE Winter Simulation Conference
52019The detection and the control of machine/chamber mismatching in semiconductormanufacturingChouichi, A.; Blue, J.; Yugma, C.; Pasqualini, F.; JAKEY BLUE Winter Simulation Conference
62019Chamber Mismatching Calibration with Adjusted Run-to-Run Regulation in Semiconductor ManufacturingChouichi A; Blue J; Yugma C; Pasqualini F.; JAKEY BLUE Proceedings - 2019 IEEE International Conference on Smart Manufacturing, Industrial and Logistics Engineering, SMILE 2019
72019A Structure Data-Driven Framework for Virtual Metrology ModelingWei-Ting Yang; JAKEY BLUE ; Agnes Roussy; Jacques Pinaton; Marco S. ReisIEEE Transactions on Automation Science and Engineering1311
82018Single machine scheduling with consideration of preventivemaintenance and machine healthLiu, Shu Han; Weng, Hao Chen; JAKEY BLUE; KWEI-LONG HUANG; KWEI-LONG HUANG ; JAKEY BLUE MATEC Web of Conferences
92018The light behavior from shallow trench isolation profiles at chemical mechanical planarization step and correlation with optical endpoint system by interferometryBourzgui, S.; Georges, G.; Roussy, A.; Blue, J.; Faivre, E.; Pinaton, J.; JAKEY BLUE Proceedings of SPIE - The International Society for Optical Engineering
102018Automatic equipment fault fingerprint extraction for the fault diagnostic on the batch process dataRostami, H.; Blue, J.; Yugma, C.; JAKEY BLUE Applied Soft Computing Journal
112018Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition: APC: Advanced process control; AM: Advanced metrologyYang, W.-T.; Blue, J.; Roussy, A.; Reis, M.; Pinaton, J.; JAKEY BLUE 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference
122018Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturingChouichi, A.; Blue, J.; Yugma, C.; Pasqualini, F.; JAKEY BLUE 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference
132018Equipment Deterioration Modeling and Causes Diagnosis in Semiconductor ManufacturingRostami, H.; Blue, J.; Chen, A.; ARGON CHEN ; JAKEY BLUE IEEE International Conference on Automation Science and Engineering00
142018Impact of integrating equipment health in production scheduling for semiconductor fabricationKao, Y.-T.; Dauzère-Pérès, Stéphane; JAKEY BLUE ; SHI-CHUNG CHANG Computers and Industrial Engineering2320
152017Run-To-Run sensor variation monitoring for process fault diagnosis in semiconductor manufacturingBlue, J.; Roussy, A.; Pinaton, J.; JAKEY BLUE Winter Simulation Conference
162017Translation-Invariant Multiscale Energy-Based PCA for Monitoring Batch Processes in Semiconductor ManufacturingRato, T.J.; Blue, J.; Pinaton, J.; Reis, M.S.; JAKEY BLUE IEEE Transactions on Automation Science and Engineering
172017Device pattern impact on optical endpoint detection by interferometry for STI CMPBourzgui S; Roussy A; Blue J; Georges G; Faivre E; Labory K; Allard A.; JAKEY BLUE ICPT 2017 - International Conference on Planarization/CMP Technology
182017Key Effects and Process Parameters Extraction on the CD of Reactive Ion Etching (RIE) Based on DOE ModelingRizquez, M.; Roussy, A.; Blue, J.; Bucelle, L.; Pinaton, J.; Pasquet, J.; JAKEY BLUE IEEE Transactions on Semiconductor Manufacturing
192017Equipment condition diagnosis and fault fingerprint extraction in semiconductor manufacturingRostami, H.; Blue, J.; Yugma, C.; JAKEY BLUE 2016 15th IEEE International Conference on Machine Learning and Applications
202017Generalized Overall Equipment Effectiveness for integrated scheduling and process controlKao, Y.-T.; Chang, S.-C.; Blue, J.; JAKEY BLUE ; SHI-CHUNG CHANG IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings00
212016Opportunity for improving fab effectiveness by predictive overall equipment effectiveness (POEE)Kao, Y.-T.; Chang, S.-C.; Dauzere-Peres, S.; Blue, J.; JAKEY BLUE e-Manufacturing and Design Collaboration Symposium 2016
222015Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlookYugma, C.; Blue, J.; Dauz?re-P?r?s, S.; Obeid, A.; JAKEY BLUE Journal of Scheduling
232015Spatial risk assessment on circular domains: Application to wafer profile monitoringPadonou, E.; Roustant, O.; Blue, J.; Duverneuil, H.; JAKEY BLUE 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference
242014Integration of scheduling and advanced process control in semiconductor manufacturing: Review and outlookYugma, C.; Blue, J.; Dauzere-P?r?s, S.; Vialletelle, P.; JAKEY BLUE IEEE International Conference on Automation Science and Engineering
252014FDC R2R variation monitoring for sensor level diagnosis in tool condition hierarchyBlue, J.; Roussy, A.; Pinaton, J.; JAKEY BLUE ASMC (Advanced Semiconductor Manufacturing Conference)
262013Tool condition diagnosis with a recipe-independent hierarchical monitoring schemeBlue, J.; Gleispach, D.; Roussy, A.; Scheibelhofer, P.; JAKEY BLUE IEEE Transactions on Semiconductor Manufacturing
272012Efficient FDC based on hierarchical tool condition monitoring schemeBlue, J.; Roussy, A.; Thieullen, A.; Pinaton, J.; JAKEY BLUE ASMC (Advanced Semiconductor Manufacturing Conference)
282011Spatial Variance Spectrum Analysis and Its Application to Unsupervised Detection of Systematic Wafer Spatial VariationsBlue, Jakey; JAKEY BLUE IEEE Transactions on Automation Science and Engineering98
292010Performance analysis of demand planning approaches for aggregating, forecasting and disaggregating interrelated demandsChen, Argon ; JAKEY BLUE International Journal of Production Economics
302010時間與空間上之變異分析及其在半導體工程資料分析上的應用Blue, Jakey; 藍俊宏 
312009Recipe-Independent Indicator for Tool Health Diagnosis and Predictive MaintenanceChen, A.; ARGON CHEN ; JAKEY BLUE ; Chen, Argon IEEE Transactions on Semiconductor Manufacturing3329
322009Optimum sampling for track PEB CD integrated metrologyChen, A.; Hsueh, S.; ARGON CHEN ; JAKEY BLUE 2009 IEEE International Conference on Automation Science and Engineering20
332007Demand planning approaches to aggregating and forecasting interrelated demands for safety stock and backup capacity planningChen, Argon ; Hsu, C.-H.; JAKEY BLUE International Journal of Production Research1813
342006Recipe-independent tool health indicator and fault prognosisChen, A.; Blue, J.; Chou, T.-C.; ARGON CHEN ; JAKEY BLUE IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings20